Y₂O₃ can reduce unwanted AlF particle generation and contamination. BALINIT DYLYN can even match emissivity in certain applications.
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Semiconductor showerheads
| Skiktalternativ | Beläggningsmaterial | Beläggningsteknik | Beläggningshårdhet HIT [GPa] | Friktionskoefficient (torr) vs. stål | Max. driftstemp. [°C] | Processtemperatur [°C] | |
|---|---|---|---|---|---|---|---|
| a-C:H:Si | PACVD | ~ 15-25 | 0.05 - 0.2 | 350 | < 220 |
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