Oerlikon Balzers‘ tailored diamond-like coating (DLC) solutions such as BALINIT DYLYN, endow wafer contact tooling and positioning systems with beneficial properties including low friction, excellent adhesion, and high thermal conductivity, without contaminating sensitive semiconductor wafers.
The better a DLC coating meets individual requirements, the lower the total cost of ownership. Our capabilities and application expertise enable us to precisely tailor the properties of our DLC coatings to a customers’ specific demands. High hardness, a low coefficient of friction and excellent wear resistance help to significantly reduce particle formation and thus enable high yield manufacturing – a key factor, especially regarding smaller feature sizes. Guaranteed reproducible quality of the coated parts provides consistent process reliability.
Oerlikon Balzers specializes in the provision of tailored semiconductor coatings that satisfy the highly stringent needs of the semiconductor industry. Just one example amongst many such solutions: a completely new coating that is resistant to etching by fluorinated chemistries, for applications including wafer e-chucks, pedestals, etch kits, showerheads and vacuum pump components.